SJ 2807-1987电子级气体中痕量氢的测试方法 气敏色谱法
本方法适用于电子级氢、氮、氧、氩和氦和氨中痕量氢的测定,测定范围为0.05~37ppm。
色谱柱:内径4mm,长度1m,5A分子筛柱80-100目
SJ 2807-1987 Test method for trace hydrogen in electronic grade gases Gas sensitive chromatography
This method is suitable for the determination of trace hydrogen in electronic grade hydrogen, nitrogen, oxygen, argon, helium, and ammonia, with a determination range of 0.05-37ppm.
Chromatography column: inner diameter 4mm, length 1m, 5A molecular sieve column 80-100 mesh