本标准适用于半导体材料、分立器件和集成电路生产工艺过程中使用的电子级氩、按其使用要求电子级氩分为两级，代号为：电子 Ⅰ级氩代号为：DZAr-Ⅰ ; Ⅱ级氩代号为：DZAr- Ⅱ
SJ 2797-1987电子级氩


分子筛, 5A
英文名: Molecular sieves, 5A
别名: 5A|5A分子筛,钙分子筛
CAS号: 69912-79-4 分子式: Ca/nNa12-2n[(AlO2)12(SiO2)12] · xH2O

色谱柱：内径4mm，长度1m，5A分子筛柱80-100目

*高使用温度：320°C
适用于；安捷伦6890；7820,7890,8860,8890；岛津GC14C，GC-2010，GC-2014，GC-2030，布鲁克，PE，瓦里安，磐诺，福立，华爱，天瑞，天美，川仪，东西电子，北分瑞利
分离：氢，氧，氮，一氧化碳，甲烷，永jiu气体

This standard applies to electronic grade argon used in the production process of semiconductor materials, discrete devices, and integrated circuits. Electronic grade argon is divided into two levels according to its usage requirements, with the code being: Electronic Grade I Argon and the code being DZAr - I; Grade II argon code: DZAr - II
SJ 2797-1987 Electronic Grade Argon
Molecular sieve, 5A
English name: Molecular Sieves, 5A
Alias: 5A | 5A molecular sieve, calcium molecular sieve
CAS number: 69912-79-4 Molecular formula: Ca/nNa12-2n [(AlO2) 12 (SiO2) 12] · xH2O
Chromatography column: inner diameter 4mm, length 1m, 5A molecular sieve column 80-100 mesh
*High operating temperature: 320 ° C
Applicable to; Agilent 6890; 7820,7890,8860,8890； Shimadzu GC14C, GC-2010, GC-2014, GC-2030, Brooke, PE, Varian, Panno, Fuli, Huaai, Tianrui, Tianmei, Chuanyi, Dongxi Electronics, Beifen Ruili
Separation: Hydrogen, Oxygen, Nitrogen, Carbon Monoxide, Methane, Permanent Gas